Publication:

Localized power spectral density analysis on atomic force microscopy images for advanced patterning applications

Date

2019
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorMoussa, Alain
dc.contributor.authorSaib, Mohamed
dc.contributor.authorPaolillo, Sara
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorIlliberi, Andrea
dc.contributor.authorMaes, Jan
dc.contributor.authorDeng, Shaoren
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorLeray, Philippe
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorSaib, Mohamed
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorIlliberi, Andrea
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorDeng, Shaoren
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorLeray, Philippe
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.accessioned2021-10-27T14:24:17Z
dc.date.available2021-10-27T14:24:17Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33630
dc.identifier.urlhttps://doi.org/10.1117/12.2515178
dc.source.beginpage109591O
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXXIII
dc.source.conferencedate24/02/2019
dc.source.conferencelocationSan Jose, CA USA
dc.title

Localized power spectral density analysis on atomic force microscopy images for advanced patterning applications

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
43083.pdf
Size:
1.33 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions