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Conference contributions
Integration of wet cleaning in 45 nm pitch BEOL processing
Publication:
Integration of wet cleaning in 45 nm pitch BEOL processing
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Date
2013
Meeting abstract
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27224.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kesters, Els
;
Le, Quoc Toan
;
Lazzarino, Frederic
;
Decoster, Stefan
;
Wilson, Chris
;
Holsteyns, Frank
;
De Gendt, Stefan
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1894
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Acq. date: 2025-12-15
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Views
1894
since deposited on 2021-10-21
2
last month
Acq. date: 2025-12-15
Citations