Publication:
Low-k dielectric reliability in copper interconnects
Date
| dc.contributor.author | Li, Yunlong | |
| dc.contributor.imecauthor | Li, Yunlong | |
| dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
| dc.contributor.thesisadvisor | Maex, Karen | |
| dc.contributor.thesisadvisor | Groeseneken, Guido | |
| dc.date.accessioned | 2021-10-16T17:27:32Z | |
| dc.date.available | 2021-10-16T17:27:32Z | |
| dc.date.issued | 2007-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12476 | |
| dc.identifier.url | http://hdl.handle.net/1979/971 | |
| dc.title | Low-k dielectric reliability in copper interconnects | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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