Novel approach to simulation of the silylation bake in the DESIRE process

dc.contributor.author	Weiss, M.
dc.contributor.author	Goethals, Mieke
dc.date.accessioned	2021-09-29T15:53:11Z
dc.date.available	2021-09-29T15:53:11Z
dc.date.embargo	9999-12-31
dc.date.issued	1996
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1657
dc.source.beginpage	313
dc.source.endpage	316
dc.source.journal	Microelectronic Engineering
dc.source.volume	30
dc.title	Novel approach to simulation of the silylation bake in the DESIRE process
dc.type	Journal article
dspace.entity.type	Publication
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