Publication:
HfO2 and HfSixOyNz high-k layers deposited by MOCVD in mixed gas flows of N2O and O2
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1913 since deposited on 2021-10-15
2last month
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Acq. date: 2026-01-09
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Metrics
Views
1913 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2026-01-09
Citations