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Laser bonding of glass to silicon using polymer for microsystems packaging
Publication:
Laser bonding of glass to silicon using polymer for microsystems packaging
Date
2007-06
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bardin, Fabrice
;
Kloss, Stephan
;
Wang, Changhai
;
Moore, Andrew J.
;
Jourdain, Anne
;
De Wolf, Ingrid
;
Hand, Duncan P.
Journal
Journal of Microelectromechanical Systems
Abstract
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1874
since deposited on 2021-10-16
Acq. date: 2025-10-28
Citations
Metrics
Views
1874
since deposited on 2021-10-16
Acq. date: 2025-10-28
Citations