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Conformal doping for FINFET's: a fabrication and metrology challenge
Publication:
Conformal doping for FINFET's: a fabrication and metrology challenge
Date
2008
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Everaert, Jean-Luc
;
Rosseel, Erik
;
Jurczak, Gosia
;
Hoffmann, Thomas Y.
;
Eyben, Pierre
;
Mody, Jay
;
Koelling, Sebastian
;
Gilbert, Matthieu
;
Pawlak, Bartek
;
Duffy, R.
;
Van Dal, Mark
Journal
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1966
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1966
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations