Publication:

Low-temperature IGZO technology on transparent plastic foil by atmospheric spatial atomic layer deposition

Date

2019
Proceedings Paper
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dc.contributor.authorFrijter, Corne
dc.contributor.authorVerbeek, Roy
dc.contributor.authorde Haas, Gerard
dc.contributor.authorKe, Tung Huei
dc.contributor.authorVandenplas, Erwin
dc.contributor.authorAmeys, Marc
dc.contributor.authorvan der Steen, Jan-Laurens
dc.contributor.authorGelinck, Gerwin
dc.contributor.authorMeulenkamp, Eric
dc.contributor.authorPoodt, Paul
dc.contributor.authorKronemeijer, Auke
dc.contributor.authorKatsouras, Ilias
dc.contributor.imecauthorVerbeek, Roy
dc.contributor.imecauthorKe, Tung Huei
dc.contributor.imecauthorVandenplas, Erwin
dc.contributor.imecauthorAmeys, Marc
dc.contributor.imecauthorvan der Steen, Jan-Laurens
dc.contributor.imecauthorKronemeijer, Auke
dc.contributor.imecauthorKatsouras, Ilias
dc.contributor.orcidimecKe, Tung Huei::0000-0001-8381-4998
dc.contributor.orcidimecAmeys, Marc::0000-0001-7140-2101
dc.date.accessioned2021-10-27T09:23:07Z
dc.date.available2021-10-27T09:23:07Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32991
dc.identifier.urlhttps://doi.org/10.36463/idw.2019.0489
dc.source.beginpageAMD7-4L
dc.source.conferenceInternational Display Workshops - IDW 2019
dc.source.conferencedate27/11/2019
dc.source.conferencelocationSapporo Japan
dc.title

Low-temperature IGZO technology on transparent plastic foil by atmospheric spatial atomic layer deposition

dc.typeProceedings paper
dspace.entity.typePublication
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