Metasurface Cointegration with Colloidal Quantum Dot Photodiodes Enabling Facile Spectral Sensors

Abstract

We demonstrate the cointegration of meta-optics and colloidal Quantum Dot Photodiodes (QDPDs) in microcavities for compact, next-generation short-wave infrared spectrometers and spectral imagers. Microcavities act as narrowband filters, while QDPDs provide broadband sensitivity up to 1600 nm. Amorphous silicon metasurfaces, nanopatterned via DUV lithography, enable tunable optical filtering through effective refractive index variation. We introduce a novel meta-optic design that integrates optical and electrical functionality, enabling direct monolithic integration onto CMOS readout circuits. This scalable platform offers a new approach for high-throughput fabrication of miniaturized spectral detector arrays for industrial applications in environmental, biomedical, food analysis, and other domains.