Publication:
Lifetime study in advanced isolation techniques
Date
| dc.contributor.author | Poyai, Amporn | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, C. | |
| dc.contributor.author | Rooyackers, Rita | |
| dc.contributor.author | Badenes, Gonçal | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T13:36:19Z | |
| dc.date.available | 2021-10-14T13:36:19Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4675 | |
| dc.source.conference | International Conference on Electronic Materials & European Materials Research Society Spring Meeting. Symposium M: Advanced Cha | |
| dc.source.conferencelocation | ||
| dc.title | Lifetime study in advanced isolation techniques | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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