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Materials with low dielectric constant for nanoelectronics

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dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T18:31:20Z
dc.date.available2021-10-22T18:31:20Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24959
dc.source.beginpage156
dc.source.issue1
dc.source.journalElectronic Techniques, Ser. 3: Microelectronics
dc.title

Materials with low dielectric constant for nanoelectronics

dc.typeJournal article
dspace.entity.typePublication
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