Publication:
Materials with low dielectric constant for nanoelectronics
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-22T18:31:20Z | |
| dc.date.available | 2021-10-22T18:31:20Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24959 | |
| dc.source.beginpage | 156 | |
| dc.source.issue | 1 | |
| dc.source.journal | Electronic Techniques, Ser. 3: Microelectronics | |
| dc.title | Materials with low dielectric constant for nanoelectronics | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |