Publication:
Mobility and dielectric quality of 1-nm EOT HfSiON on Si(110) and (100)
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1920 since deposited on 2021-10-17
2last month
Acq. date: 2026-02-28
Citations
Statistics
Views
1920 since deposited on 2021-10-17
2last month
Acq. date: 2026-02-28
Citations