Publication:
Mobility and dielectric quality of 1-nm EOT HfSiON on Si(110) and (100)
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1911 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-09
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1911 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-09
Citations