Publication:

Influence and evolution of 193i resist composition during VUV exposure

Date

2012
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Author(s)

Kunnen, Eddy
;
Vaglio Pret, Alessandro  
;
Verdonck, Patrick  
;
Gronheid, Roel  

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Abstract

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1820 since deposited on 2021-10-20
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1820 since deposited on 2021-10-20
Acq. date: 2026-06-25

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