Publication:

Improvement of AlN SAW performance by introduction of TiN nucleation layer on silicon substrate

Date

2010
Presentation
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dc.contributor.authorSoltani, A.
dc.contributor.authorTalbi, A.
dc.contributor.authorMortet, Vincent
dc.contributor.authorBassam, A.
dc.contributor.authorOussous, A.
dc.contributor.authorMonroy, E.
dc.contributor.authorHaenen, Ken
dc.contributor.authorde Jaeger, J.C.
dc.contributor.authorPernod, P.
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-18T21:44:42Z
dc.date.available2021-10-18T21:44:42Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18008
dc.source.conferenceHasselt Diamond Workshop - SBDD XV
dc.source.conferencedate22/02/2010
dc.source.conferencelocationHasselt Belgium
dc.title

Improvement of AlN SAW performance by introduction of TiN nucleation layer on silicon substrate

dc.typeOral presentation
dspace.entity.typePublication
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