Publication:

IMEC's research program and the ITRS challenges

Date

2002
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorDeclerck, Gilbert
dc.contributor.imecauthorDeclerck, Gilbert
dc.date.accessioned2021-10-14T21:27:07Z
dc.date.available2021-10-14T21:27:07Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6241
dc.source.beginpage52
dc.source.conferenceSemiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology
dc.source.conferencedate12/05/2002
dc.source.conferencelocationPhildelphia, PA USA
dc.source.endpage66
dc.title

IMEC's research program and the ITRS challenges

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions