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Work function (WF) simulations of Ta/HfO2, Ta2C/HfO2 and Ta2C/La2O3/HfO2 capped high-k stacks
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1928 since deposited on 2021-10-16
Acq. date: 2025-12-17
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Views
1928 since deposited on 2021-10-16
Acq. date: 2025-12-17
Citations