Publication:
A CMOS compatible polycrystalline silicon-germanium based piezoresistive pressure sensor
Date
| dc.contributor.author | Gonzalez, Pilar | |
| dc.contributor.author | Guo, Bin | |
| dc.contributor.author | Severi, Simone | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Gonzalez, Pilar | |
| dc.contributor.imecauthor | Severi, Simone | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.date.accessioned | 2021-10-19T13:50:26Z | |
| dc.date.available | 2021-10-19T13:50:26Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18979 | |
| dc.source.beginpage | 1076 | |
| dc.source.conference | 16th International Conference on Solid-State Sensors, Actuators and Microsystems - Transducers | |
| dc.source.conferencedate | 5/06/2011 | |
| dc.source.conferencelocation | Beijing China | |
| dc.source.endpage | 1079 | |
| dc.title | A CMOS compatible polycrystalline silicon-germanium based piezoresistive pressure sensor | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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