Publication:

Electrical characterization of InGaAs ultra-shallow junctions

Date

2009
Proceedings Paper
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Author(s)

Petersen, Dirch H.
;
Hansen, Ole
;
Boggild, Peter
;
Lin, Rong
;
Nielsen, Peter F.
;
Lin, Dennis  
;
Adelmann, Christoph  
;
Alian, AliReza  
;
Merckling, Clement  
;
Penaud, Julien
;
Brammertz, Guy  
;
Goossens, Jozefien
;
Vandervorst, Wilfried  
;
Clarysse, Trudo

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1923 since deposited on 2021-10-18
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1923 since deposited on 2021-10-18
Acq. date: 2026-10-11

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