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Electrical characterization of InGaAs ultra-shallow junctions
Publication:
Electrical characterization of InGaAs ultra-shallow junctions
Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Petersen, Dirch H.
;
Hansen, Ole
;
Boggild, Peter
;
Lin, Rong
;
Nielsen, Peter F.
;
Lin, Dennis
;
Adelmann, Christoph
;
Alian, AliReza
;
Merckling, Clement
;
Penaud, Julien
;
Brammertz, Guy
;
Goossens, Jozefien
;
Vandervorst, Wilfried
;
Clarysse, Trudo
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1916
since deposited on 2021-10-18
Acq. date: 2025-10-24
Citations
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Views
1916
since deposited on 2021-10-18
Acq. date: 2025-10-24
Citations