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Conference contributions
Templated DSA with EUV-exposed pre-patterns
Publication:
Templated DSA with EUV-exposed pre-patterns
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Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Boeckx, Carolien
;
Doise, Jan
;
Chan, BT
;
Gronheid, Roel
;
De Gendt, Stefan
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Views
1868
since deposited on 2021-10-23
1
last month
1
last week
Acq. date: 2025-12-10
Citations