Publication:

GaN-on-Si mm-wave RF Devices Integrated in a 200mm CMOS Compatible 3-Level Cu BEOL

Date

2020

Proceedings Paper

https://doi.org/10.1109/IEDM13553.2020.9372056

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Author(s)

Parvais, Bertrand

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;

Peralagu, Uthayasankaran

;

Rodriguez, Raul

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;

;

ElKashlan, Rana Y.

;

;

Sibaja-Hernandez, Arturo

;

;

;

Collaert, Nadine

;

Journal

na

Statistics

1938 since deposited on 2021-12-06

6last month

Acq. date: 2026-06-04