Publication:

GaN-on-Si mm-wave RF Devices Integrated in a 200mm CMOS Compatible 3-Level Cu BEOL

Date

2020

Proceedings Paper

https://doi.org/10.1109/IEDM13553.2020.9372056

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Author(s)

Parvais, Bertrand

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;

Peralagu, Uthayasankaran

;

Rodriguez, Raul

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;

;

ElKashlan, Rana Y.

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;

Sibaja-Hernandez, Arturo

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;

;

Collaert, Nadine

;

Journal

na

Metrics

1925 since deposited on 2021-12-06

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Acq. date: 2025-12-13