Publication:

GaN-on-Si mm-wave RF Devices Integrated in a 200mm CMOS Compatible 3-Level Cu BEOL

Date

2020
Proceedings Paper
https://doi.org/10.1109/IEDM13553.2020.9372056
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Author(s)

Parvais, Bertrand  
;
Alian, AliReza  
;
Peralagu, Uthayasankaran  
;
Rodriguez, Raul  
;
Yadav, Sachin  
;
Khaled, Ahmad  
;
ElKashlan, Rana Y.  
;
Putcha, Vamsi  
;
Sibaja-Hernandez, Arturo  
;
Zhao, Ming  
;
Wambacq, Piet  
;
Collaert, Nadine  
;
Waldron, Niamh  

Journal

na

Abstract

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