Publication:
A five-layer thin film MCM-Si design using oxynitride dielectrics
Date
| dc.contributor.author | Lernout, Jo | |
| dc.contributor.author | Vanfleteren, Jan | |
| dc.contributor.author | Van Calster, Andre | |
| dc.contributor.author | Schols, G. | |
| dc.contributor.imecauthor | Vanfleteren, Jan | |
| dc.contributor.imecauthor | Van Calster, Andre | |
| dc.contributor.orcidimec | Vanfleteren, Jan::0000-0002-9654-7304 | |
| dc.date.accessioned | 2021-09-30T12:33:50Z | |
| dc.date.available | 2021-09-30T12:33:50Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2718 | |
| dc.source.beginpage | 39 | |
| dc.source.endpage | 42 | |
| dc.source.issue | 1 | |
| dc.source.journal | Microelectronics International (Hybrid Circuits) | |
| dc.source.volume | 15 | |
| dc.title | A five-layer thin film MCM-Si design using oxynitride dielectrics | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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