Publication:
Plasma sealing of a low-k dielectric polymer
Date
| dc.contributor.author | Martin Hoyas, Ana | |
| dc.contributor.author | Schuhmacher, Jorg | |
| dc.contributor.author | Whelan, Caroline | |
| dc.contributor.author | Celis, Jean-Pierre | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T14:45:55Z | |
| dc.date.available | 2021-10-15T14:45:55Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9274 | |
| dc.source.beginpage | 32 | |
| dc.source.endpage | 37 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 76 | |
| dc.title | Plasma sealing of a low-k dielectric polymer | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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