Publication:

Short- and damage-free process for patterning magnetic tunnel junctions for high-density application

Date

2015

Meeting abstract

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Author(s)

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Souriau, Laurent

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Paraschiv, Vasile

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Goossens, Danny

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Yamashita, Fumiko

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Tahara, Shigeru

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Nishimura, Eichi

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Donadio, Gabriele Luca

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;

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Couet, Sebastien

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Kar, Gouri Sankar

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Furnemont, Arnaud

Metrics

1899 since deposited on 2021-10-22

Acq. date: 2025-12-10