EUV scanner printability evaluation of natural blank defects detected by actinic blank inspection

dc.contributor.author	Takagi, Noriaki
dc.contributor.author	Watanabe, Hidehiro
dc.contributor.author	Van Den Heuvel, Dieter
dc.contributor.author	Jonckheere, Rik
dc.contributor.author	Gallagher, Emily
dc.contributor.imecauthor	Van Den Heuvel, Dieter
dc.contributor.imecauthor	Jonckheere, Rik
dc.contributor.imecauthor	Gallagher, Emily
dc.contributor.orcidimec	Jonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimec	Gallagher, Emily::0000-0002-2927-8298
dc.date.accessioned	2021-10-22T23:24:26Z
dc.date.available	2021-10-22T23:24:26Z
dc.date.issued	2015
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/25975
dc.source.conference	Workshop NGL - The Japan Society of Applied Physics
dc.source.conferencedate	6/07/2015
dc.source.conferencelocation	Tokyo Japan
dc.title	EUV scanner printability evaluation of natural blank defects detected by actinic blank inspection
dc.type	Oral presentation
dspace.entity.type	Publication
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