Publication:
Ultralow-k insulating materials for 10-nm technology node and beyond
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-22T18:31:25Z | |
| dc.date.available | 2021-10-22T18:31:25Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24961 | |
| dc.identifier.url | http://www.ieeesisc.org/program.html | |
| dc.source.conference | 46th IEEE Semiconductor Interface Specialists Conference | |
| dc.source.conferencedate | 2/12/2015 | |
| dc.source.conferencelocation | Arlington, VA USA | |
| dc.title | Ultralow-k insulating materials for 10-nm technology node and beyond | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |