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Integration and manufacturing aspects of moving from HT-10.10 to ZoneBOND™ in temporary wafer bonding and debonding for 3D applications
Publication:
Integration and manufacturing aspects of moving from HT-10.10 to ZoneBOND™ in temporary wafer bonding and debonding for 3D applications
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Date
2013
Proceedings Paper
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27099.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jourdain, Anne
;
Phommahaxay, Alain
;
Verbinnen, Greet
;
Murdoch, Gayle
;
Miller, Andy
;
Rebibis, Kenneth June
;
Guerrero, Alice
;
McCutcheon, Jeremy
;
Privett, Mark
;
Neidrich, Jason
;
Beyer, Gerald
;
Beyne, Eric
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1963
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Acq. date: 2025-12-11
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Metrics
Views
1963
since deposited on 2021-10-21
2
last month
1
last week
Acq. date: 2025-12-11
Citations