Publication:
Reliability the limit to gate oxide shrink?
Date
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Wauters, Jan | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.date.accessioned | 2021-10-06T11:14:41Z | |
| dc.date.available | 2021-10-06T11:14:41Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3478 | |
| dc.source.beginpage | 23,25 | |
| dc.source.issue | 7 | |
| dc.source.journal | European Semiconductor | |
| dc.source.volume | 21 | |
| dc.title | Reliability the limit to gate oxide shrink? | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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