Publication:
Low-leakage Ru-strontium titanate-Ru metal-insulator-metal capacitors for sub-20nm technology node in dynamic random access memory
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1894 since deposited on 2021-10-22
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Acq. date: 2026-10-12
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1894 since deposited on 2021-10-22
1last month
1last week
Acq. date: 2026-10-12
Citations