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Dopant/carrier profiling in non-planar or textured structures
Publication:
Dopant/carrier profiling in non-planar or textured structures
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Date
2010
Proceedings Paper
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21382.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Douhard, Bastien
;
Eyben, Pierre
;
Seidel, F.
;
Hantschel, Thomas
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Acq. date: 2025-12-15
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Views
1931
since deposited on 2021-10-18
2
last month
Acq. date: 2025-12-15
Citations