Publication:

Influence of composition of SiCN for surface activated bonding

Date

2018
Proceedings Paper
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Author(s)

Inoue, Fumihiro  
;
Peng, Lan  
;
Iacovo, Serena  
;
Phommahaxay, Alain  
;
Visker, Jakob  
;
Verdonck, Patrick  
;
Meersschaut, Johan  
;
Dara, Praveen  
;
Sleeckx, Erik  
;
Miller, Andy  
;
Beyne, Eric  

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