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Titanium (germano-)silicides featuring 10-9 $Xcm2 contact resistivity and improved compatibility to advanced CMOS technology

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1968 since deposited on 2021-10-26
1last month
Acq. date: 2026-03-01

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Views

1968 since deposited on 2021-10-26
1last month
Acq. date: 2026-03-01

Citations