Publication:

Calibration and verification of a stochastic model for EUV resist

Date

2012

Proceedings Paper

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Files

24660.pdf 735.45 KB

Author(s)

;

Philippou, Alexander

;

Klostermann, Ulrich

;

Siebert, Joachim

;

Philipsen, Vicky

;

Hendrickx, Eric

;

Vandeweyer, Tom

;

Jonckheere, Rik

Metrics

1951 since deposited on 2021-10-20

2last month

Acq. date: 2025-12-13