Publication:

Probing 3D-semiconductors structures

Date

2011
Meeting abstract
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dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-19T20:38:09Z
dc.date.available2021-10-19T20:38:09Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20009
dc.source.beginpageAS-TuA10
dc.source.conferenceAVS 58th Annual International Symposium and Exhibition
dc.source.conferencedate6/11/2011
dc.source.conferencelocationKnoxville, TN USA
dc.title

Probing 3D-semiconductors structures

dc.typeMeeting abstract
dspace.entity.typePublication
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