Publication:
Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis
Date
| dc.contributor.author | Rincon Delgadillo, Paulina | |
| dc.contributor.author | Nealey, Paul | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | Matsunaga, Koichi | |
| dc.contributor.author | Somervell, Mark | |
| dc.contributor.author | Nafus, Kathleen | |
| dc.contributor.author | Cao, Yi | |
| dc.contributor.author | Lin, Guanyang | |
| dc.contributor.imecauthor | Rincon Delgadillo, Paulina | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.contributor.imecauthor | Nafus, Kathleen | |
| dc.date.accessioned | 2021-10-20T15:13:28Z | |
| dc.date.available | 2021-10-20T15:13:28Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21392 | |
| dc.source.conference | FujiFilm Litho Workshop | |
| dc.source.conferencedate | 11/09/2012 | |
| dc.source.conferencelocation | Dresden Germany | |
| dc.title | Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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