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Technology challenges related to ultimate CMOS and the end-of-roadmap microelectronics

Date

2002
Proceedings Paper
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dc.contributor.authorClaeys, Cor
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-14T21:14:51Z
dc.date.available2021-10-14T21:14:51Z
dc.date.embargo9999-12-31
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6115
dc.source.beginpage455
dc.source.conferenceProceedings 17th Symposium on Microelectronics Technology and Devices - SBMicro
dc.source.conferencedate9/09/2002
dc.source.conferencelocationPorto Allegre Brazil
dc.source.endpage470
dc.title

Technology challenges related to ultimate CMOS and the end-of-roadmap microelectronics

dc.typeProceedings paper
dspace.entity.typePublication
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