Publication:
Kinetics of defect annihilation in directed self-assembly of block copolymers using chemically nano-patterned surfaces
Date
| dc.contributor.author | Rincon Delgadillo, Paulina | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | Lin, Guanyang | |
| dc.contributor.author | Cao, Yi | |
| dc.contributor.author | Romo, Ainhoa | |
| dc.contributor.author | Somervell, Mark | |
| dc.contributor.author | Nafus, Kathleen | |
| dc.contributor.author | Nealey, Paul | |
| dc.contributor.imecauthor | Rincon Delgadillo, Paulina | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.contributor.imecauthor | Nafus, Kathleen | |
| dc.date.accessioned | 2021-10-22T05:05:07Z | |
| dc.date.available | 2021-10-22T05:05:07Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24431 | |
| dc.source.conference | SPIE Advanced Lithography 2014 | |
| dc.source.conferencedate | 23/02/2014 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Kinetics of defect annihilation in directed self-assembly of block copolymers using chemically nano-patterned surfaces | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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