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Is the constant current charge-to-breakdown method still a good tool to measure oxide reliability

Date

1997
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dc.contributor.authorNigam, Tanya
dc.contributor.authorDegraeve, Robin
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHeyns, Marc
dc.date.accessioned2021-09-30T09:20:43Z
dc.date.available2021-09-30T09:20:43Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2054
dc.source.conference28th IEEE Semiconductor Interface Specialists Conference - SISC
dc.source.conferencedate4/12/1997
dc.source.conferencelocationCharleston, SC USA
dc.title

Is the constant current charge-to-breakdown method still a good tool to measure oxide reliability

dc.typeMeeting abstract
dspace.entity.typePublication
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