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Articles
Characterization of Cu surface cleaning by hydrogen plasma
Publication:
Characterization of Cu surface cleaning by hydrogen plasma
Date
2001
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baklanov, Mikhaïl
;
Shamiryan, Denis
;
Tokei, Zsolt
;
Beyer, Gerald
;
Conard, Thierry
;
Vanhaelemeersch, Serge
;
Maex, Karen
Journal
Journal of Vacuum Science & Technology B
Abstract
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1984
since deposited on 2021-10-14
Acq. date: 2025-10-22
Citations
Metrics
Views
1984
since deposited on 2021-10-14
Acq. date: 2025-10-22
Citations