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Joint first principles and experimental investigation on the improved performance of the Ta₂O₅interface layer for an MoS₂/WS₂channel

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dc.contributor.authorVan Troeye, Benoit
dc.contributor.authorYang, Shao-Heng
dc.contributor.authorLan, Hao-Yu
dc.contributor.authorZemlyanov, Dmitry
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorChen, Zhihong
dc.contributor.authorPourtois, Geoffrey
dc.contributor.imecauthorVan Troeye, Benoit
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecVan Troeye, Benoit::0000-0003-2073-1188
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.date.accessioned2025-06-24T03:57:06Z
dc.date.available2025-06-24T03:57:06Z
dc.date.issued2025
dc.description.wosFundingTextThe authors acknowledge the Imec Industrial Affiliation Program (IIAP) for funding. This work was funded through the joint MOU between the Indiana Economic Development Corporation, Purdue University, imec with in-kind support from the Applied Research Institute.
dc.identifier.doi10.1063/5.0266701
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45835
dc.publisherAIP Publishing
dc.source.beginpage223105-1
dc.source.endpage223105-6
dc.source.issue22
dc.source.journalAPPLIED PHYSICS LETTERS
dc.source.numberofpages6
dc.source.volume126
dc.subject.keywordsOXIDE THIN-FILMS
dc.subject.keywordsTEMPERATURE
dc.subject.keywordsTANTALUM
dc.title

Joint first principles and experimental investigation on the improved performance of the Ta₂O₅interface layer for an MoS₂/WS₂channel

dc.typeJournal article
dspace.entity.typePublication
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