Standard cell architectures for N2 node: transition from FinFET to NanoSheet and to ForkSheet device

dc.contributor.author	Chehab, Bilal
dc.contributor.author	Weckx, Pieter
dc.contributor.author	Ryckaert, Julien
dc.contributor.author	Jang, Doyoung
dc.contributor.author	Verkest, Diederik
dc.contributor.author	Spessot, Alessio
dc.contributor.imecauthor	Chehab, Bilal
dc.contributor.imecauthor	Weckx, Pieter
dc.contributor.imecauthor	Ryckaert, Julien
dc.contributor.imecauthor	Jang, Doyoung
dc.contributor.imecauthor	Verkest, Diederik
dc.contributor.imecauthor	Spessot, Alessio
dc.contributor.orcidimec	Verkest, Diederik::0000-0001-6567-2746
dc.date.accessioned	2023-01-18T10:22:13Z
dc.date.available	2021-11-02T15:58:54Z
dc.date.available	2023-01-18T10:22:13Z
dc.date.issued	2021
dc.identifier.doi	10.1117/12.2548573
dc.identifier.eisbn	978-1-5106-3424-4
dc.identifier.issn	0277-786X
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/37723
dc.publisher	SPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage	1132807
dc.source.conference	Conference on Design-Process-Technology Co-Optimization for Manufacturability XIV
dc.source.conferencedate	FEB 26-27, 2020
dc.source.conferencelocation	San Jose
dc.source.journal	Proceedings of SPIE
dc.source.numberofpages	8
dc.source.volume	11328
dc.title	Standard cell architectures for N2 node: transition from FinFET to NanoSheet and to ForkSheet device
dc.type	Proceedings paper
dspace.entity.type	Publication
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