Publication:
Reactions mechanisms in Al2O3 atomic layer deposition studied by density functional theory
Date
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.author | Pourtois, Geoffrey | |
| dc.contributor.author | Sioncke, Sonja | |
| dc.contributor.author | Van Elshocht, Sven | |
| dc.contributor.author | Pierloot, Christine | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.contributor.imecauthor | Pourtois, Geoffrey | |
| dc.contributor.imecauthor | Van Elshocht, Sven | |
| dc.contributor.imecauthor | Pierloot, Christine | |
| dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
| dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
| dc.date.accessioned | 2021-10-20T10:38:25Z | |
| dc.date.available | 2021-10-20T10:38:25Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20581 | |
| dc.source.conference | ALD Conference | |
| dc.source.conferencedate | 17/06/2012 | |
| dc.source.conferencelocation | Dresden Germany | |
| dc.title | Reactions mechanisms in Al2O3 atomic layer deposition studied by density functional theory | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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