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A new HF vapor process for native oxide removal, suited for cluster applications
Publication:
A new HF vapor process for native oxide removal, suited for cluster applications
Date
1999
Proceedings Paper
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3826.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Storm, Arjen
;
Sprey, Hessel
;
Maes, Jan
;
Granneman, E.
;
De Blank, Rene
;
Röhr, Erika
;
Caymax, Matty
;
Heyns, Marc
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2006
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-08
Citations
Metrics
Views
2006
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-08
Citations