Publication:
MEMS design and modeling
Date
| dc.contributor.author | Rottenberg, Xavier | |
| dc.contributor.imecauthor | Rottenberg, Xavier | |
| dc.date.accessioned | 2021-10-22T22:24:02Z | |
| dc.date.available | 2021-10-22T22:24:02Z | |
| dc.date.issued | 2015-06 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25840 | |
| dc.source.conference | Modeling and Simulation of Microsystems - Microtech | |
| dc.source.conferencedate | 14/06/2015 | |
| dc.source.conferencelocation | Washington DC USA | |
| dc.title | MEMS design and modeling | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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