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Silicon surface roughening by the decomposition of hydrogen peroxide

Date

1994
Proceedings Paper
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dc.contributor.authorSchmidt, Harald
dc.contributor.authorMeuris, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorVerhaverbeke, Steven
dc.contributor.authorHeyns, Marc
dc.contributor.authorHellemans, L.
dc.contributor.authorSnauwaert, J.
dc.contributor.authorDillenbeck, C.
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-09-29T12:55:14Z
dc.date.available2021-09-29T12:55:14Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/491
dc.source.beginpage102
dc.source.conferenceProceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
dc.source.conferencedate15/10/1993
dc.source.conferencelocationNew Orleans, LA USA
dc.source.endpage110
dc.title

Silicon surface roughening by the decomposition of hydrogen peroxide

dc.typeProceedings paper
dspace.entity.typePublication
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