Publication:

A Bottom-Up Volume Reconstruction Method for Atom Probe Tomography

Date

2022
Journal article
https://doi.org/10.1017/S1431927621012836
Simple item page Full metadata Statistics
 
dc.contributor.authorCools, Sigfried
dc.contributor.authorLing, Yu Ting
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorDe Beenhouwer, Jan
dc.contributor.authorSijbers, Jan
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorLing, Yu Ting
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorDe Beenhouwer, Jan
dc.contributor.imecauthorSijbers, Jan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecDe Beenhouwer, Jan::0000-0001-5253-1274
dc.contributor.orcidimecSijbers, Jan::0000-0003-4225-2487
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.date.accessioned2022-08-29T08:55:56Z
dc.date.available2022-04-11T12:47:49Z
dc.date.available2022-08-29T08:55:56Z
dc.date.issued2022
dc.identifier.doi10.1017/S1431927621012836
dc.identifier.issn1431-9276
dc.identifier.pmidMEDLINE:35088688
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39612
dc.publisherCAMBRIDGE UNIV PRESS
dc.source.beginpage1102
dc.source.endpage1115
dc.source.issue4
dc.source.journalMICROSCOPY AND MICROANALYSIS
dc.source.numberofpages14
dc.source.volume28
dc.subject.disciplinePhysics
dc.subject.keywordsFIELD EVAPORATION
dc.subject.keywordsSPECIMEN
dc.subject.keywordsFINFETS
dc.subject.keywordsSHAPES
dc.title

A Bottom-Up Volume Reconstruction Method for Atom Probe Tomography

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles