Publication:
ULSI-device characterization using nano-SRP
Date
| dc.contributor.author | De Wolf, Peter | |
| dc.contributor.author | Trenkler, Thomas | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Hellemans, L. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-30T08:09:00Z | |
| dc.date.available | 2021-09-30T08:09:00Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1834 | |
| dc.source.beginpage | 92 | |
| dc.source.conference | Proceedings of Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices ; 6-8 May 1997 | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 101 | |
| dc.title | ULSI-device characterization using nano-SRP | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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