Publication:
Studies of copper surfaces modified by thermal and plasma treatments
Date
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-14T16:37:23Z | |
| dc.date.available | 2021-10-14T16:37:23Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5060 | |
| dc.source.beginpage | D9.17.1 | |
| dc.source.conference | Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; MRS Spring Meeting 2000 Symposium. | |
| dc.source.conferencedate | 23/04/2000 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.source.endpage | D9.17.6 | |
| dc.title | Studies of copper surfaces modified by thermal and plasma treatments | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |