Publication:
Moiré effect-based Overlay target design for OPO improvements
Date
| dc.contributor.author | Van Den Heuvel, Dieter | |
| dc.contributor.author | Leray, Philippe | |
| dc.contributor.author | Hajaj, E. | |
| dc.contributor.author | Shaphirov, D. | |
| dc.contributor.author | Ashwal, E. | |
| dc.contributor.author | Dror, C. | |
| dc.contributor.author | Yohanan, R. | |
| dc.contributor.author | Ghinovker, M. | |
| dc.contributor.author | Gordon, K. | |
| dc.contributor.author | Liu, Z. | |
| dc.contributor.author | Liu, X. | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | Spielberg, H. | |
| dc.contributor.imecauthor | Van Den Heuvel, Dieter | |
| dc.contributor.imecauthor | Leray, Philippe | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.date.accessioned | 2021-10-31T11:57:26Z | |
| dc.date.available | 2021-10-31T11:57:26Z | |
| dc.date.issued | 2021 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37279 | |
| dc.source.beginpage | 1161125 | |
| dc.source.conference | SPIE Advanced Lithography | |
| dc.source.conferencedate | 22/02/2021 | |
| dc.source.conferencelocation | online online | |
| dc.title | Moiré effect-based Overlay target design for OPO improvements | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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