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Intrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectrics
Publication:
Intrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectrics
Date
2013
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanstreels, Kris
;
Wu, Chen
;
Verdonck, Patrick
;
Schneider, Dieter
;
Gonzalez, Mario
;
Martini, Roberto
;
Baklanov, Mikhaïl
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1908
since deposited on 2021-10-21
1
last month
Acq. date: 2025-12-08
Citations
Metrics
Views
1908
since deposited on 2021-10-21
1
last month
Acq. date: 2025-12-08
Citations