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Intrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectrics

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1908 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-08

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1908 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-08

Citations