Publication:
Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers
Date
| dc.contributor.author | Kulha, Pavel | |
| dc.contributor.author | Babchenko, Oleg | |
| dc.contributor.author | Kromka, Alexander | |
| dc.contributor.author | Husak, Miroslav | |
| dc.contributor.author | Haenen, Ken | |
| dc.contributor.imecauthor | Haenen, Ken | |
| dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
| dc.date.accessioned | 2021-10-20T12:24:23Z | |
| dc.date.available | 2021-10-20T12:24:23Z | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 0042-207X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20960 | |
| dc.source.beginpage | 689 | |
| dc.source.endpage | 692 | |
| dc.source.issue | 6 | |
| dc.source.journal | Vacuum | |
| dc.source.volume | 86 | |
| dc.title | Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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